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| Varian TURBO V81-M Turbo Pump, ISO 63, 9698901 |
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Description
New Varian TURBO V81-M Turbo Pump, ISO 63, 9698901
High speed, high compression: Varian's design mission is to maximize performance at minimum cost and size.
MacroTorr® Technology: This is the most effective turbo-pumping technology available. Thanks to the powerful MacroTorr innovation you can:
- maximize the throughput of the pump
- work with foreline pressures as high as 18 mbar
- increase the compression ratio by decades, most notably for light gases
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- keep the size and weight of the pump to a minimum
Very high gas-load capabilities: Thanks to our state-of-the-art numerical modeling tools, the turbo pumping stages are designed to minimize power consumption. Special care is given to the thermal design of the cooling fins and the internal temperature distribution to ensure efficient operation.
Monolithic rotor: Varian, Inc. produces each pump rotor from a single piece of high-tech aluminum alloy. This major technological achievement improves the life of the pump for several reasons:
- The rotor is stronger.
- Rotor weight is minimized.
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- Stresses on the bearings are reduced.
Highly reliable, maintenance-free ceramic bearings: These bearings need no lubrication, which means no oil, no refills, and no contamination. Ceramic is lighter, harder, smoother, and thermally more stable than any steel. So, a ceramic-ball bearing can run faster, hotter, and more quietly than any steel-ball bearing. Performance has never been so trouble-free.
The Varian, Inc. Turbo-V81-M Pump has these specifications:
- Pumping speed:
- With 4½-inch ConFlat® or NW63 ISO flange: 77 l/sec (N2), 65 l/sec (He), 50 l/sec (H2)
- With 2¾-inch ConFlat or NW40 KF flange: 50 l/sec (N2), 56 l/sec (He), 46 l/sec (H2)
- Compression ratio: 5 × 108 (N2), 7 × 104 (He), 7 × 103 (H2)
- Base pressure with recommended forepump: 3.8 × 10-10 torr
- Foreline flange: NW16 KF
- Rotational speed: 80,000 rpm
- Start-up time: <60 seconds
- Recommended forepump:
- Rotary-vane: Varian, Inc. DS-42 or DS-102
- Dry scroll: Varian, Inc. SH-110
- Cooling requirements: natural air convection, forced-air or water cooling optional
- Maximum bakeout temperature:
- With ConFlat Flange: 120 °C at inlet flange
- With ISO or KF flange: 80 °C at inlet flange
- Vibration level (displacement): <0.01 µm at inlet flange
- Weight: 6.6 lb. with ConFlat Flange, 4.4 lb. with ISO or KF flange
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